1061_INTRODUCTION TO MICROELECTROMECHANICAL SYSTEMS
Course Period：FromNow ~ Any Time
Course Intro
Course Plan
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Ch1 MEMS introduction
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Ch2.1 wafer preparation
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Ch2.2 Basic IC fabrication
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Ch3 Oxidation
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Ch4 Doping
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Ch5 Deposition
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Ch6 Photolithography
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Ch6.1 Advanced lithography
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Ch6.2 Etching
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Ch7 Bulk Micromaching
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Ch8 Bonding
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Ch9 surface micromachining
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L-edit
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MUMPs handbook
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Term project topics
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ch10 What is MCNC MUMPS
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ch11 LIGA
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ch12 Non-IC Process Micromachin
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底下的空間還大的很
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評分表
Co-Instructor(s)
林哲信
林哲信
Co-Instructor(s)
劉柏輝
劉柏輝
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