1071_INTRODUCTION TO SEMICONDUCTOR MICROFABRICATION TECHNOLOGY
Course Period:FromNow ~ Any Time
Course Intro
Course Plan
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107-1_半導體製程導論(學期末成績)_V9
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107-1_半導體製程導論(點名單)_V9(上傳用)
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20181107半導體製程導論小考1-V4
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20181226半導體製程導論小考2-V1(舊版,有些不會考)
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20181226半導體製程導論小考2-V4
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Chapter00_Introduction_v2
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Chapter01_Introduction_v11(已加作業題號)
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Chapter01_Introduction_v12
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Chapter02_Characteristics of Semiconductor Materials_v16(已加作業題號)
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Chapter02_Characteristics of Semiconductor Materials_v17
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Chapter02_Characteristics of Semiconductor Materials_v19
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Chapter02_Characteristics of Semiconductor Materials_v21
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Chapter04_Silicon and Wafer Preparation_v15
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Chapter09_IC Fabrication Process Overview_v11
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Chapter10_Oxidation_v10
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Chapter10_Oxidation_v11
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Chapter11_Deposition_v10
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Chapter11_Deposition_v11
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Chapter13_Photolithography_v10
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Chapter13_Photolithography_v9(已加作業題號)
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Chapter14_Photolithography Alignment and Exposure_v10
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Chapter14_Photolithography Alignment and Exposure_v9(新增作業)
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Chapter15_Photolithography Resist Development and Advanced Lithography_v7(已加作業)
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Chapter15_Photolithography Resist Development and Advanced Lithography_v8
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Chapter16_Etch_v10(加作業題目)
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Chapter16_Etch_v8
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Chapter17_ Doping_v11(加作業題目)
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Chapter17_ Doping_v9
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半導體midterm-20181114_v5
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半導體製程導論作業解答CH1-CH4
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半導體製程導論作業解答CH10
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半導體製程導論作業解答CH11
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半導體製程導論作業解答CH13
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半導體製程導論作業解答CH14
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半導體製程導論作業解答CH15
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半導體製程導論作業解答CH9
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修課須知_v4
Co-Instructor(s)
莊婉君
莊婉君
Co-Instructor(s)
陳楷
陳楷
Co-Instructor(s)
陳威龍
陳威龍