1081_微流體系統專題
上課期間：從 即日起 到 無限期
課程介紹
課程安排
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Ch 13. MEMS sensors
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Ch0 Course introduction - 2019
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Ch1 MEMS introduction
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Ch2.1 wafer preparation
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Ch2.2 Basic IC fabrication
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Ch3 Oxidation
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Ch4 Doping
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Ch5 Deposition
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Ch6 Photolithography
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Ch6.1 Advanced lithography
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Ch6.2 Etching
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Ch7 Bulk Micromaching
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Ch8 Bonding
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Ch9 surface micromachining
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ch10 What is MCNC MUMPS
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ch11 LIGA
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ch12 Non-IC Process Micromachin
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底下的空間還大的很
教師 / 林哲信
相關課程
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