1031_微機電系統概論
上課期間：從 即日起 到 無限期
課程介紹
課程安排
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Ch0 Course introduction
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Ch1 MEMS introduction
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Ch2.1 wafer preparation
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Ch2.2 Basic IC fabrication
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Ch3 Oxidation
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Ch4 Doping
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Ch5 Deposition
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Ch6 Advanced lithography
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Ch6.2 Etching
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Ch7 Bulk Micromaching
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Ch8 Bonding
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Ch9 surface micromachining
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L-Edit Student v7.12
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ch10 What is MCNC MUMPS
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ch11 LIGA
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ch12 MEMS sensors
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ledit
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stu712
教師 / 林哲信
教師 / 林哲緯
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