1031_INTRODUCTION TO MICROELECTROMECHANICAL SYSTEMS
Course Period：FromNow ~ Any Time
Course Intro
Course Plan
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Ch0 Course introduction
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Ch1 MEMS introduction
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Ch2.1 wafer preparation
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Ch2.2 Basic IC fabrication
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Ch3 Oxidation
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Ch4 Doping
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Ch5 Deposition
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Ch6 Advanced lithography
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Ch6.2 Etching
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Ch7 Bulk Micromaching
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Ch8 Bonding
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Ch9 surface micromachining
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L-Edit Student v7.12
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ch10 What is MCNC MUMPS
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ch11 LIGA
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ch12 MEMS sensors
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ledit
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stu712
Co-Instructor(s)
林哲信
林哲信
Co-Instructor(s)
林哲緯
林哲緯
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